Electrostatic chuck with improved spacing mask and workpiece detection device



FIG. 1 is a top view of the electrostatic chuck with the improved spacing mask and workpiece detection device;

FIG. 2 is an elevation view of the electrostatic chuck when looking down along the y-axis of FIG. 1;

FIG. 3 is a detailed view of part of the electrostatic chuck seen in FIG. 2;

FIG. 4 is a bottom view of the electrostatic chuck;

FIG. 5 is an elevation view of the electrostatic chuck when looking up along the y-axis of FIG. 1;

FIG. 6 is an elevation view of the electrostatic chuck when looking to the left along the x-axis of FIG. 1; and,

FIG. 7 is an elevation view of the electrostatic chuck when looking to the right along the x-axis in FIG. 1. 

The ornamental design for an electrostatic chuck with improved spacing mask and workpiece detection device, as shown. 